Grounded radio-frequency electrodes in contact with high density plasmas
نویسندگان
چکیده
منابع مشابه
Grounded radio-frequency electrodes in contact with high density plasmas
An analytical model is developed of an asymmetric electrode system immersed in a plasma, consisting of two dc-grounded electrodes, where the smaller one is biased at 13.56 MHz. The model is compared with a set of experiments performed in a high density low pressure plasma source an electron cyclotron resonance source where a second electrode is immersed into the plasma and powered by radio freq...
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ژورنال
عنوان ژورنال: Physics of Plasmas
سال: 2005
ISSN: 1070-664X,1089-7674
DOI: 10.1063/1.2089227